Application:
- Wafer Size : 150mm, 200mm and 300mm
Available Process:
- Dry Ox, Wet Ox, Annealing
Experience:
- 850℃ to 1250℃ Atmospheric
Advantages of Si-Boat
Reduced defect density and particle counts leading to yield improvement
- Using silicon vs quartz or SiC
- Using mono crystal vs poly crystal silicon (no CVD growing defects )
- Sophisticated rod designLess overlap rod to wafer
Lower metal contamination
- No metal impurities in silicon as in quartz or SiC
No slip lines or crystal damages
- No friction caused by identical thermal expansion of boat and wafer
- No warp of the boat as it uses quartz material for high-temperature process
Savings during processing
- Increased tool uptime compared to quartz and SiC boats
- Less cost of cleaning and maintenance
- Repairable and customizable