High Capacity, High Efficiency Vacuum inlet or Exhaust Trap
- Protects oil-sealed vacuum pumps and dry vacuum pumps
- Remove corrosive and abrasive particles that can destroy your vacuum pump
- Processes such as LPCVD, PECVD, ALD, MOCVD, Metal Etch and HVPE
- Modular design makes the unit easier to disassemble and clean
- Element replacement is fast and easy
- Water or refrigerant cooling option is available
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MULTI-TRAP® configuation
- Stage 1 knocks down heavy particles and some condensables Cooling coils remove more condensables and lowers the gas temperature
- Stage 2 cartridge elements make the first filtering pass
- Stage 3 elements remove finer particles
- Stage 4 Gas exits
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Vacuum Filter Elements for all Processes and Systems
- Multiple vacuum filter media choices for different applications
- Easy changing vacuum filter cartridges
- Easily upgrade your traps as your needs change
- Save valuable time not breaking down your entire vacuum system to change elements